Li-Yuan Zhu Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Li-Yuan Zhu returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
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1 | Systematic Study of the SiOx Film with Different Stoichiometry by Plasma-Enhanced Atomic Layer Deposition and Its Application in SiOx/SiO2 Super-Lattice |