Kwang-Ho Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kwang-Ho Kim returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Fabrication and properties of AlN film on GaN substrate by using remote plasma atomic layer deposition method
2Fabrication and Properties of GaN MIS Capacitors with a Remote-Plasma Atomic-Layer-Deposited Al2O3 Gate Dielectric
3Initial Stages of Ruthenium Film Growth in Plasma-Enhanced Atomic Layer Deposition