Kwang-Ho Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kwang-Ho Kim returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Initial Stages of Ruthenium Film Growth in Plasma-Enhanced Atomic Layer Deposition
2Fabrication and properties of AlN film on GaN substrate by using remote plasma atomic layer deposition method
3Fabrication and Properties of GaN MIS Capacitors with a Remote-Plasma Atomic-Layer-Deposited Al2O3 Gate Dielectric