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Dirk. J. Gravesteijn Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Dirk. J. Gravesteijn returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Comparison of tungsten films grown by CVD and hot-wire assisted atomic layer deposition in a cold-wall reactor
2Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia