A. Thean Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by A. Thean returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Dynamic threshold voltage influence on Ge pMOSFET hysteresis
2Low temperature deposition of 2D WS2 layers from WF6 and H2S precursors: impact of reducing agents