Scott Monaghan Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Scott Monaghan returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1High aspect ratio iridescent three-dimensional metal-insulator-metal capacitors using atomic layer deposition
2Nonhomogeneous spatial distribution of filamentary leakage current paths in circular area Pt/HfO2/Pt capacitors
3Structural and electrical analysis of the atomic layer deposition of HfO2/n-In0.53Ga0.47As capacitors with and without an Al2O3 interface control layer
4Structural and Electrical Analysis of Thin Interface Control Layers of MgO or Al2O3 Deposited by Atomic Layer Deposition and Incorporated at the high-k/III-V Interface of MO2/InxGa1-xAs (M = Hf|Zr, x = 0|0.53) Gate Stacks


Shortcuts



© 2014-2018 plasma-ald.com