Your search for plasma enhanced atomic layer deposition publications authored by Scott Monaghan returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||High aspect ratio iridescent three-dimensional metal-insulator-metal capacitors using atomic layer deposition|
|2||Nonhomogeneous spatial distribution of filamentary leakage current paths in circular area Pt/HfO2/Pt capacitors|
|3||Structural and electrical analysis of the atomic layer deposition of HfO2/n-In0.53Ga0.47As capacitors with and without an Al2O3 interface control layer|
|4||Structural and Electrical Analysis of Thin Interface Control Layers of MgO or Al2O3 Deposited by Atomic Layer Deposition and Incorporated at the high-k/III-V Interface of MO2/InxGa1-xAs (M = Hf|Zr, x = 0|0.53) Gate Stacks|
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