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  • Plasma-Enhanced Atomic Layer Deposition
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Seong-Jun Jeong Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Seong-Jun Jeong returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Improvement of Morphological Stability of PEALD-Iridium Thin Films by Adopting Two-Step Annealing Process
2Improvement of Copper Diffusion Barrier Properties of Tantalum Nitride Films by Incorporating Ruthenium Using PEALD
3Improved Oxygen Diffusion Barrier Properties of Ruthenium-Titanium Nitride Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition
4Plasma-enhanced atomic layer deposition of Ir thin films for copper adhesion layer