Dae-Young Moon Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Dae-Young Moon returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic Layer Deposition of Copper Seed Layers from a (hfac)Cu(VTMOS) Precursor
2Characteristics of high-k dielectric ECR-ALD lanthanum hafnium oxide (LHO) films
3Comparison of the Deposition Characteristics and Electrical Properties for La2O3, HfO2 and LHO Films
4Deposition of Al2O3 by Using ECR-ALD for Organic Substrate Devices


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