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Dae-Young Moon Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Dae-Young Moon returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Characteristics of high-k dielectric ECR-ALD lanthanum hafnium oxide (LHO) films
2Comparison of the Deposition Characteristics and Electrical Properties for La2O3, HfO2 and LHO Films
3Enhancement of the Electrical Properties of Ga-doped ZnO Thin Films on Polycarbonate Substrates by Using a TiO2 Buffer Layer
4Atomic Layer Deposition of Copper Seed Layers from a (hfac)Cu(VTMOS) Precursor
5Deposition of Al2O3 by Using ECR-ALD for Organic Substrate Devices
6Plasma-enhanced atomic layer deposition of Cu–Mn films with formation of a MnSixOy barrier layer