Jong-Wan Park Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jong-Wan Park returned 10 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic Layer Deposition of La2O3 Thin Films by Using an Electron Cyclotron Resonance Plasma Source
2Lanthanum-Oxide Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition
3Plasma-enhanced atomic layer deposition of Cu–Mn films with formation of a MnSixOy barrier layer
4Al2O3/TiO2 multilayer thin films grown by plasma enhanced atomic layer deposition for organic light-emitting diode passivation
5Correlation of carbon content with the thermal stability of ruthenium deposited by using RF-direct plasma-enhanced atomic-layer deposition
6Characteristics of high-k dielectric ECR-ALD lanthanum hafnium oxide (LHO) films
7Enhancement of the Electrical Properties of Ga-doped ZnO Thin Films on Polycarbonate Substrates by Using a TiO2 Buffer Layer
8Atomic Layer Deposition of Copper Seed Layers from a (hfac)Cu(VTMOS) Precursor
9Comparison of the Deposition Characteristics and Electrical Properties for La2O3, HfO2 and LHO Films
10Deposition of Al2O3 by Using ECR-ALD for Organic Substrate Devices