Jong-Wan Park Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jong-Wan Park returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Al2O3/TiO2 multilayer thin films grown by plasma enhanced atomic layer deposition for organic light-emitting diode passivation
2Atomic Layer Deposition of Copper Seed Layers from a (hfac)Cu(VTMOS) Precursor
3Atomic Layer Deposition of La2O3 Thin Films by Using an Electron Cyclotron Resonance Plasma Source
4Characteristics of high-k dielectric ECR-ALD lanthanum hafnium oxide (LHO) films
5Comparison of the Deposition Characteristics and Electrical Properties for La2O3, HfO2 and LHO Films
6Correlation of carbon content with the thermal stability of ruthenium deposited by using RF-direct plasma-enhanced atomic-layer deposition
7Deposition of Al2O3 by Using ECR-ALD for Organic Substrate Devices


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