Pieter Rowlette Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Pieter Rowlette returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1An Analysis of the Deposition Mechanisms involved during Self-Limiting Growth of Aluminum Oxide by Pulsed PECVD
2Plasma-Enhanced Atomic Layer Deposition of Anatase TiO2 Using TiCl4
3Plasma-Enhanced Atomic Layer Deposition of Semiconductor Grade ZnO Using Dimethyl Zinc
4Self-limiting deposition of semiconducting ZnO by pulsed plasma-enhanced chemical vapor deposition