Yang Shen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yang Shen returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Remote plasma-enhanced atomic layer deposition of gallium oxide thin films with NH3 plasma pretreatment
2Remote plasma-enhanced atomic layer deposition of metallic TiN films with low work function and high uniformity