Yang Shen Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Yang Shen returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Remote plasma-enhanced atomic layer deposition of metallic TiN films with low work function and high uniformity|
|2||Remote plasma-enhanced atomic layer deposition of gallium oxide thin films with NH3 plasma pretreatment|