M. Sopanen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by M. Sopanen returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride
2High-k GaAs metal insulator semiconductor capacitors passivated by ex-situ plasma-enhanced atomic layer deposited AlN for Fermi-level unpinning
3Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces
4Comparison of ammonia plasma and AlN passivation by plasma-enhanced atomic layer deposition