Search 1536 plasma ALD publications by:
Search 1536 plasma ALD publications by:
S. Thomas Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by S. Thomas returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Number | Title |
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1 | Si atomic layer epitaxy based on Si2H6 and remote He plasma bombardment |
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