Shin Yokoyama Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Shin Yokoyama returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer controlled deposition of silicon nitride with self-limiting mechanism
2Atomic-layer selective deposition of silicon nitride on hydrogen-terminated Si surfaces
3Atomic layer controlled deposition of silicon nitride and in situ growth observation by infrared reflection absorption spectroscopy