Ganesh M. Sundaram Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ganesh M. Sundaram returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma enhanced atomic layer deposition of molybdenum carbide and nitride with bis(tert-butylimido)bis(dimethylamido) molybdenum
2Conformal Fe, Co and Ni Films from Oxides and Nitrides Grown by Atomic Layer Deposition
3Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
4Process Control of Atomic Layer Deposition Molybdenum Oxide Nucleation and Sulfidation to Large-Area MoS2 Monolayers