Ganesh M. Sundaram Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ganesh M. Sundaram returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Conformal Fe, Co and Ni Films from Oxides and Nitrides Grown by Atomic Layer Deposition
2Plasma enhanced atomic layer deposition of molybdenum carbide and nitride with bis(tert-butylimido)bis(dimethylamido) molybdenum
3Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
4Process Control of Atomic Layer Deposition Molybdenum Oxide Nucleation and Sulfidation to Large-Area MoS2 Monolayers