M. Liu Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by M. Liu returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Preliminary investigation of high-k materials - TiO2 doped Ta2O5 films by remote plasma ALD |