J. H. Lee Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by J. H. Lee returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
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1 | Plasma enhanced atomic layer deposition of SrTiO3 thin films with Sr(tmhd)2 and Ti(i-OPr)4 |