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An economical, compact inductively coupled plasma source.

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  • Plasma-Enhanced Atomic Layer Deposition
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Olivier Joubert Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Olivier Joubert returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Patterning of silicon nitride for CMOS gate spacer technology. III. Investigation of synchronously pulsed CH3F/O2/He plasmas
2Spectral analysis of the line-width and line-edge roughness transfer during self-aligned double patterning approach