Mladen Petravic Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mladen Petravic returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Investigation of residual chlorine in TiO2 films grown by Atomic Layer Deposition
2Prevention of spontaneous combustion of cellulose with a thin protective Al2O3 coating formed by atomic layer deposition
3Residual chlorine in TiO2 films grown at low temperatures by plasma enhanced atomic layer deposition


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