Vincent Omarjee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Vincent Omarjee returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1PEALD of Copper using New Precursors for Next Generation of Interconnections
2Ultra-Low Temperature Deposition of Copper Seed Layers by PEALD
3Copper-ALD Seed Layer as an Enabler for Device Scaling