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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
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Travis J. Anderson Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Travis J. Anderson returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Investigation of AlGaN/GaN HEMTs Passivated by AlN Films Grown by Atomic Layer Epitaxy
2Atomic Layer Epitaxy AlN for Enhanced AlGaN/GaN HEMT Passivation
3Practical Challenges of Processing III-Nitride/Graphene/SiC Devices
4ALD TiN Schottky Gates for Improved Electrical and Thermal Stability in III-N Devices