Wen Yang Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Wen Yang returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Optical properties and bandgap evolution of ALD HfSiOx films |
| 2 | Resistive switching properties of plasma enhanced-ALD La2O3 for novel nonvolatile memory application |