Your search for plasma enhanced atomic layer deposition publications authored by Perttu Sippola returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma|
|2||Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films|
|3||Silicon surface passivation with atomic layer deposited aluminum nitride|
|4||Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films|
© 2014-2019 plasma-ald.com