Perttu Sippola Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Perttu Sippola returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma
2Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films
3Silicon surface passivation with atomic layer deposited aluminum nitride
4Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films


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