Perttu Sippola Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Perttu Sippola returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma
2	Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films
3	Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide
4	Silicon surface passivation with atomic layer deposited aluminum nitride
5	Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films

Shortcuts

© 2014-2019 plasma-ald.com