Perttu Sippola Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Perttu Sippola returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma
2Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films
3Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide
4Silicon surface passivation with atomic layer deposited aluminum nitride
5Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films


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