P. A. von Hauff Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by P. A. von Hauff returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Electrical Comparison of HfO2 and ZrO2 Gate Dielectrics on GaN
2ZrO2 on GaN metal oxide semiconductor capacitors via plasma assisted atomic layer deposition
3High Mobility (210cm2/Vs), High Capacitance (7.2uF/cm2) ZrO2 on GaN Metal Oxide Semiconductor Capacitor via ALD