P. A. von Hauff Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by P. A. von Hauff returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Electrical Comparison of HfO2 and ZrO2 Gate Dielectrics on GaN
2High Mobility (210cm2/Vs), High Capacitance (7.2uF/cm2) ZrO2 on GaN Metal Oxide Semiconductor Capacitor via ALD
3ZrO2 on GaN metal oxide semiconductor capacitors via plasma assisted atomic layer deposition