Kevin D. Osborn Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kevin D. Osborn returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Examining the role of hydrogen in the electrical performance of in situ fabricated metal-insulator-metal trilayers using an atomic layer deposited Al2O3 dielectric