Markus Bosund Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Markus Bosund returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Comparison of ammonia plasma and AlN passivation by plasma-enhanced atomic layer deposition
2GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride
3High-k GaAs metal insulator semiconductor capacitors passivated by ex-situ plasma-enhanced atomic layer deposited AlN for Fermi-level unpinning
4Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF6 based plasmas
5Properties of AlN grown by plasma enhanced atomic layer deposition
6Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces
7Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors
8Tribological properties of thin films made by atomic layer deposition sliding against silicon