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  • Plasma-Enhanced Atomic Layer Deposition
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Krishna C. Saraswat Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Krishna C. Saraswat returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1High temperature phase transformation of tantalum nitride films deposited by plasma enhanced atomic layer deposition for gate electrode applications