Ya-Hong Xie Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ya-Hong Xie returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Effects of rapid thermal annealing on the properties of AlN films deposited by PEALD on AlGaN/GaN heterostructures