Joohyun Park Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Joohyun Park returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Terahertz Quantum Plasmonics of Nanoslot Antennas in Nonlinear Regime
2The effect of oxygen remote plasma treatment on ZnO TFTs fabricated by atomic layer deposition


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