Your search for plasma enhanced atomic layer deposition publications authored by Joohyun Park returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Terahertz Quantum Plasmonics of Nanoslot Antennas in Nonlinear Regime|
|2||The effect of oxygen remote plasma treatment on ZnO TFTs fabricated by atomic layer deposition|
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