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2021 Year in Review




The publication database currently has 1628 entries.
Search from:
203 Films Compositions
272 Precursors and Plasma Gases
77 Deposition Hardwares
251 Film and Plasma Characteristics
90 Theses

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Recent Database Additions
Effect of atomic layer plasma treatment on TALD-ZrO2 film to improve the corrosion protection of Mg-Ca alloy Deposition and Characterization of RP-ALD SiO2 Thin Films with Different Oxygen Plasma Powers Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation
Search 1628 plasma ALD publications by:
203 Films Compositions
272 Precursors and Plasma Gases
77 Deposition Hardwares
251 Film and Plasma Characteristics

Mustafa Alevli Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mustafa Alevli returned 12 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic Layer Deposition of AlN Thin Films in Three Different Growth Regimes
2Atomic layer deposition of GaN at low temperatures
3Optical properties of AlN thin films grown by plasma enhanced atomic layer deposition
4Self-limiting growth of GaN using plasma-enhanced atomic layer deposition
5Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
6Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
7The Influence of Growth Temperature on the Properties of AlN Films Grown by Atomic Layer Deposition
8The influence of N2/H2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition

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