October 2022 Stats

The publication database currently has 1655 entries.

204 Films

274 Precursors

78 Dep Hardware Sets

253 Characteristics

91 Theses

5090 Authors

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2021 Year in Review

Recent Database Additions

Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy Innovative remote plasma source for atomic layer deposition for GaN devices Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition Optical in situ monitoring of plasma-enhanced atomic layer deposition process The role of active species in the N₂ and N₂-H₂ RF afterglows on selective surface nitriding of ALD-grown TiO₂ films

Mustafa Alevli Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mustafa Alevli returned 12 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Atomic Layer Deposition of AlN Thin Films in Three Different Growth Regimes
2	Atomic layer deposition of GaN at low temperatures
3	Optical properties of AlN thin films grown by plasma enhanced atomic layer deposition
4	Self-limiting growth of GaN using plasma-enhanced atomic layer deposition
5	Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
6	Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
7	The Influence of Growth Temperature on the Properties of AlN Films Grown by Atomic Layer Deposition
8	The influence of N₂/H₂ and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition