Mustafa Alevli Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mustafa Alevli returned 12 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition of GaN at low temperatures
2Atomic Layer Deposition of AlN Thin Films in Three Different Growth Regimes
3Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
4The influence of N2/H2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition
5Optical properties of AlN thin films grown by plasma enhanced atomic layer deposition
6Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
7The Influence of Growth Temperature on the Properties of AlN Films Grown by Atomic Layer Deposition
8Self-limiting growth of GaN using plasma-enhanced atomic layer deposition