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  • Plasma-Enhanced Atomic Layer Deposition
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Mustafa Alevli Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mustafa Alevli returned 12 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
2The Influence of Growth Temperature on the Properties of AlN Films Grown by Atomic Layer Deposition
3Atomic layer deposition of GaN at low temperatures
4The influence of N2/H2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition
5Optical properties of AlN thin films grown by plasma enhanced atomic layer deposition
6Self-limiting growth of GaN using plasma-enhanced atomic layer deposition
7Atomic Layer Deposition of AlN Thin Films in Three Different Growth Regimes
8Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition