September 2022 Stats

The publication database currently has 1652 entries.

204 Films

274 Precursors

77 Dep Hardware Sets

253 Characteristics

91 Theses

5082 Authors

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2021 Year in Review

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Optical in situ monitoring of plasma-enhanced atomic layer deposition process The role of active species in the N₂ and N₂-H₂ RF afterglows on selective surface nitriding of ALD-grown TiO₂ films The Applications of Ultra-Thin Nanofilm for Aerospace Advanced Manufacturing Technology Texture of atomic layer deposited ruthenium Comparative study of structural electrical dielectric and ferroelectric properties of HfO₂ deposited by plasma-enhanced atomic layer deposition and radio frequency sputtering technique for the application in 1-T FeFET

Vladamir Djara Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Vladamir Djara returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	CMOS-compatible Replacement Metal Gate InGaAs-OI FinFET With ION= 156 μA/μm at VDD= 0.5 V and IOFF= 100 nA/μm
2	High aspect ratio iridescent three-dimensional metal-insulator-metal capacitors using atomic layer deposition
3	Low D_it HfO₂/Al₂O₃/In_0.53Ga_0.47As gate stack achieved with plasma-enhanced atomic layer deposition
4	Structural and Electrical Analysis of Thin Interface Control Layers of MgO or Al₂O₃ Deposited by Atomic Layer Deposition and Incorporated at the high-k/III-V Interface of MO₂/In_xGa_1-xAs (M = Hf\|Zr, x = 0\|0.53) Gate Stacks
5	Tri-gate InGaAs-OI junctionless FETs with PE-ALD Al₂O₃ gate dielectric and H₂/Ar anneal