Sylvain David Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Sylvain David returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
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1 | Patterning of silicon nitride for CMOS gate spacer technology. III. Investigation of synchronously pulsed CH3F/O2/He plasmas |