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Justinas Palisaitis Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Justinas Palisaitis returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Epitaxial GaN using Ga(NMe2)3 and NH3 plasma by atomic layer deposition |
| 2 | Direct epitaxial nanometer-thin InN of high structural quality on 4H-SiC by atomic layer deposition |