T. Lüder Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by T. Lüder returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Al2O3/SiNx-Stacks at Increased Temperatures: Avoiding Blistering During Contact Firing


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