N. M. Terlinden Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by N. M. Terlinden returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Controlling the fixed charge and passivation properties of Si(100)/Al2O3 interfaces using ultrathin SiO2 interlayers synthesized by atomic layer deposition
2Influence of the Oxidant on the Chemical and Field-Effect Passivation of Si by ALD Al2O3
3Role of field-effect on c-Si surface passivation by ultrathin (2-20 nm) atomic layer deposited Al2O3