Jong-Min Lee Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Jong-Min Lee returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Low-Temperature ALD Growth of SrTiO3 Thin Films from Sr beta-Diketonates and Ti Alkoxide Precursors Using Oxygen Remote Plasma as an Oxidation Source|
|2||Effect of Fluoride-based Plasma Treatment on the Performance of AlGaN/GaN MISHFET|