Dheerawan Boonyawan Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Dheerawan Boonyawan returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||A Microwave Driven PE-ALD for Ultrathin Al2O3/ZnO Synthesis over Perovskite Layer|
|2||Microwave remote plasma enhanced-atomic layer deposition system with multicusp confinement chamber|