Meiling Li Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Meiling Li returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Growth of Gallium Nitride Films on Multilayer Graphene Template Using Plasma-Enhanced Atomic Layer Deposition
2Metallic indium segregation control of InN thin films grown on Si(100) by plasma-enhanced atomic layer deposition
3PEALD-Grown Crystalline AlN Films on Si(100) with Sharp Interface and Good Uniformity