Nils-Peter Harder Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Nils-Peter Harder returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Injection dependence of the effective lifetime of n-type Si passivated by Al2O3: An edge effect? |