A. Varpula Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by A. Varpula returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Properties of AlN grown by plasma enhanced atomic layer deposition
2Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF6 based plasmas
3Influence of plasma chemistry on impurity incorporation in AlN prepared by plasma enhanced atomic layer deposition
4Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces
5High-k GaAs metal insulator semiconductor capacitors passivated by ex-situ plasma-enhanced atomic layer deposited AlN for Fermi-level unpinning
6Comparison of ammonia plasma and AlN passivation by plasma-enhanced atomic layer deposition