Haewon Cho Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Haewon Cho returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Remote plasma atomic layer deposition of silicon nitride with bis(dimethylaminomethyl-silyl)trimethylsilyl amine and N2 plasma for gate spacer|
|2||Remote Plasma Atomic Layer Deposition of SiNx Using Cyclosilazane and H2/N2 Plasma|