Your search for plasma enhanced atomic layer deposition publications authored by Maxine Darnon returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Patterning of silicon nitride for CMOS gate spacer technology. III. Investigation of synchronously pulsed CH3F/O2/He plasmas|
|2||Spectral analysis of the line-width and line-edge roughness transfer during self-aligned double patterning approach|
|3||Via sidewall insulation for through cell via contacts|
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