Maxine Darnon Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Maxine Darnon returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Patterning of silicon nitride for CMOS gate spacer technology. III. Investigation of synchronously pulsed CH3F/O2/He plasmas
2Spectral analysis of the line-width and line-edge roughness transfer during self-aligned double patterning approach
3Via sidewall insulation for through cell via contacts


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