Sunyeol Jeon Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Sunyeol Jeon returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
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1 | Characteristics of Atomic-Layer-Deposited HfO2 Films by Using a Remote Plasma on Pre-Deposited Hf Metal Layer |