Eric S. Larsen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Eric S. Larsen returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Improved dielectric properties of BeO thin films grown by plasma enhanced atomic layer deposition
2Low temperature growth of Beryllium Oxide thin films prepared via plasma enhanced atomic layer deposition