Heeyeop Chae Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Heeyeop Chae returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Flexible Al2O3/plasma polymer multilayer moisture barrier films deposited by a spatial atomic layer deposition process