Hangil Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hangil Kim returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Formation of Ni silicide from atomic layer deposited Ni
2Properties of plasma-enhanced atomic layer deposited TiCx films as a diffusion barrier for Cu metallization