Search 1536 plasma ALD publications by:
Search 1536 plasma ALD publications by:
Fabian Koehler Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Fabian Koehler returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Number | Title |
---|---|
1 | Atomic Layer Deposition of SiN for spacer applications in high-end logic devices |
2 | Challenges in spacer process development for leading-edge high-k metal gate technology |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |