Fabian Koehler Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Fabian Koehler returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic Layer Deposition of SiN for spacer applications in high-end logic devices
2Challenges in spacer process development for leading-edge high-k metal gate technology