
Fabian Koehler Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Fabian Koehler returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Number | Title |
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1 | Atomic Layer Deposition of SiN for spacer applications in high-end logic devices |
2 | Challenges in spacer process development for leading-edge high-k metal gate technology |