Fabian Koehler Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Fabian Koehler returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic Layer Deposition of SiN for spacer applications in high-end logic devices|
|2||Challenges in spacer process development for leading-edge high-k metal gate technology|