Wei Ren Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Wei Ren returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Effect of deposition conditions and composition on band offsets in atomic layer deposited HfxSi1-xOy on InGaZnO4
2Low-temperature remote plasma-enhanced atomic layer deposition of graphene and characterization of its atomic-level structure