November 2022 Stats

The publication database currently has 1655 entries.

204 Films

274 Precursors

78 Dep Hardware Sets

253 Characteristics

91 Theses

5090 Authors

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2021 Year in Review

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Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy Innovative remote plasma source for atomic layer deposition for GaN devices Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition Optical in situ monitoring of plasma-enhanced atomic layer deposition process The role of active species in the N₂ and N₂-H₂ RF afterglows on selective surface nitriding of ALD-grown TiO₂ films

Ju Youn Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ju Youn Kim returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Barrier Characteristics of TaN Films Deposited by Using the Remote Plasma Enhanced Atomic Layer Deposition Method
2	Characteristics and Compositional Variation of TiN Films Deposited by Remote PEALD on Contact Holes
3	Characteristics of TiN Films Deposited by Remote Plasma-Enhanced Atomic Layer Deposition Method
4	Deposition and Plasma Measurements of Zr-Oxide Films with Low Impurity Concentrations by Remote PEALD
5	Remote plasma enhanced atomic layer deposition of TiN thin films using metalorganic precursor
6	Remote Plasma-Enhanced Atomic-Layer Deposition of TiN by Using TDMAT with a NH₃ Plasma
7	The Formation of an Almost Full Atomic Monolayer via Surface Modification by N₂O-Plasma in Atomic Layer Deposition of ZrO₂ Thin Films
8	Thermal Stability of ALD HfO₂ Thin Films and Interfacial Layers on the Oxynitride Underlayer Formed Using Remote Plasma