Ludvik Martinu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ludvik Martinu returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Tailoring angular selectivity in SiO2 slanted columnar thin films using atomic layer deposition of titanium nitride