Your search for plasma enhanced atomic layer deposition publications authored by Norbert Kaiser returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||High-Reflective Coatings For Ground and Space Based Applications|
|2||Plasma-enhanced atomic layer deposition for antireflection coatings using SiO2 as low-refractive index material|
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